Additive patterning of semiconductor film stacks

Assignee

• Applied Materials

Inventors

• John O. Dukovic (24 patents)
• Srinivas D. Nemani (236 patents)
• Ellie Yieh (178 patents)
• Praburam Gopalraja (75 patents)
• Steven Hiloong WELCH (6 patents)
• Bhargav S. Citla (20 patents)

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