Substrate holder and plating apparatus

Assignee

• Ebara

Inventors

• Yoshitaka Mukaiyama (16 patents)
• Toshio Yokoyama (59 patents)
• Junitsu Yamakawa (14 patents)
• Takuya Tsushima (21 patents)
• Tomonori Hirao (10 patents)
• Sho Tamura (32 patents)
• Hirotaka Ohashi (34 patents)

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