Defect inspection device, pattern chip, and defect inspection method

Assignee

• Hitachi High-Technologies

Inventors

• Yuta Urano (80 patents)
• Yukihiro Shibata (93 patents)
• Toshifumi Honda (113 patents)
• Yasuhiro Yoshitake (61 patents)
• Hideki Fukushima (13 patents)

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