Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › RF impedance model based fault detection

RF impedance model based fault detection

US Patent 10748748 · Granted Aug 18, 2020

Estimated economic value: $99,334,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for delivering a plurality of waveform signals during plasm2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Apparatus and method for controlling edge ring variation2025
Plasma uniformity control in pulsed DC plasma chamber2025
Methods and apparatus for controlling plasma in a plasma processing system2025
Circuits for edge ring control in shaped dc pulsed plasma process device2025
Systems and methods for tuning a MHz RF generator within a cycle of operation of2025
Multi-shape voltage pulse trains for uniformity and etch profile tuning2025
Plasma processing assembly using pulsed-voltage and radio-frequency power2025
To an inductively coupled plasma source2025
Sensor data compression in a plasma tool2025
Lift pin mechanism2025