Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pellicle fabrication methods and structures thereof

Pellicle fabrication methods and structures thereof

US Patent 10747103 · Granted Aug 18, 2020

Estimated economic value: $9,986,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

EUV pellicle and mounting method thereof on photo mask2025
Reticle container2025
Pellicle membrane with improved properties2025
Optical assembly with coating and methods of use2025
Method for forming structure of pellicle-mask structure with vent structure2025
Lithography method with reduced impacts of mask defects2025
EUV photo masks and manufacturing method thereof2025
Methods and systems for improving plasma ignition stability2025
High throughput and high position accurate method for particle inspection of mas2025
Method and device for cleaning substrates2025
Patterning interconnects and other structures by photo-sensitizing method2025
Photoresist composition and method of manufacturing a semiconductor device2025