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Home › Plasma resistant coating of porous body by atomic layer deposition

Plasma resistant coating of porous body by atomic layer deposition

US Patent 10745805 · Granted Aug 18, 2020

Estimated economic value: $40,862,000 ⓘ

Assignee

Applied Materials

Inventors

Vahid Firouzdor (44 patents)
Sumanth Banda (21 patents)
Rajinder Dhindsa (199 patents)
Daniel Sang Byun (16 patents)
Dana Marie Lovell (3 patents)

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