Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photomask blank

Photomask blank

US Patent 10712654 · Granted Jul 14, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reflective mask blank, and method for manufacturing reflective mask2025
Reflective mask blank, method of manufacturing thereof, and reflective mask2024
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2024
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2023
Method of manufacturing reflective mask blank, and reflective mask blank2023
Substrate defect inspection method and substrate defect inspection apparatus2023
Method of manufacturing reflective mask blank, reflective mask blank, and method2022
Photomask blank and method for preparing photomask2022
Photomask blank, method of manufacturing photomask, and photomask2021
Photomask blank, and method of manufacturing photomask2021
Halftone phase shift mask blank and halftone phase shift mask2021
Halftone phase shift photomask blank, making method, and halftone phase shift ph2020