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Home › Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects

Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects

US Patent 10600678 · Granted Mar 24, 2020

Estimated economic value: $21,125,000 ⓘ

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