Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum processing apparatus

Vacuum processing apparatus

US Patent 10522333 · Granted Dec 31, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas supply apparatus, vacuum processing apparatus, and gas supply method2025
Thrust foil bearing2025
Plasma processing apparatus2025
Plasma processing apparatus and plasma processing method2024
Manufacturing method of three-dimensional semiconductor device2024
Inspection method of plasma processing apparatus2024
Ion shield plate for plasma processing apparatus2023
Plasma processing apparatus and plasma processing method2023
Plasma processing apparatus and plasma processing method2023
Vacuum processing apparatus2023
Thermoelectric conversion element and thermoelectric conversion module having sa2023
Vacuum processing apparatus and operating method of vacuum processing apparatus2023