Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas supply apparatus, vacuum processing apparatus, and gas supply method

Gas supply apparatus, vacuum processing apparatus, and gas supply method

US Patent 12442455 · Granted Oct 14, 2025

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas supply control device2025
Gas supply control device2025
Etching processing method2025
Plasma processing apparatus2025
Plasma processing apparatus2025
Plasma processing apparatus2025
Manufacturing method of three-dimensional semiconductor device2024
Plasma processing method2024
Ion shield plate for plasma processing apparatus2023
Detecting method and detecting device of gas components and processing apparatus2023
Detecting method and detecting device of gas components and processing apparatus2023
Plasma processing apparatus and plasma processing method2023