Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods

Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods

US Patent 10475623 · Granted Nov 12, 2019

Estimated economic value: $77,597,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Enhanced closed loop gas based heat exchange2025
Control of plasma formation by RF coupling structures2025
Magnetic shielding for plasma sources2025
Compact high density plasma source2025
Cooling for a plasma-based reactor2023
Apparatus for spatial and temporal control of temperature on a substrate2022
Ion beam etching utilizing cryogenic wafer temperatures2022
Magnetic shielding for plasma sources2021
Ceramic layer for electrostatic chuck including embedded faraday cage for RF del2021
Ceramic layer for electrostatic chuck including embedded faraday cage for RF del2021
Ceramic layer for electrostatic chuck including embedded faraday cage for RF del2021
Maintenance mode power supply system2021