Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carbon bridged aminosilane compounds for high growth rate silicon-containing films

Carbon bridged aminosilane compounds for high growth rate silicon-containing films

US Patent 10464953 · Granted Nov 5, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Precursors and flowable CVD methods for making low-K films to fill surface featu2025
Compositions and methods using same for deposition of silicon-containing film2025
Silicon compounds and methods for depositing films using same2025
Compositions and methods using same for deposition of silicon-containing film2025
Compositions and methods using same for deposition of silicon-containing film2025
Composition for high temperature atomic layer deposition of high quality silicon2025
Composition for high temperature atomic layer deposition of high quality silicon2025
Group V and VI transition metal precursors for thin film deposition2025
Compositions and methods using same for thermal deposition silicon-containing fi2025
Siloxane compositions and methods for using the compositions to deposit silicon 2025
High temperature atomic layer deposition of silicon-containing film2025
High temperature atomic layer deposition of silicon-containing film2025