Substrate processing apparatus

Assignee

• Eugene Technology Co.

Inventors

• Jun Jin Hyon (5 patents)
• Sung Tae Je (22 patents)
• Byoung-Gyu Song (14 patents)
• Yong-Ki Kim (61 patents)
• Kyoung-Hun Kim (19 patents)
• Chang Dol KIM (9 patents)
• Yang-Sik Shin (16 patents)
• Jae-Woo Kim (107 patents)

View full patent text on Google Patents →