Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Projection exposure tool for microlithography and method for microlithographic imaging

Projection exposure tool for microlithography and method for microlithographic imaging

US Patent 10303068 · Granted May 28, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measurement method for interferometrically determining a surface shape2025
Diffractive optical element for a test interferometer2025
Method and device for correcting a telecentricity error of an imaging device2024
System and method for optical object coordinate determination2024
Device and method for characterizing the surface shape of a test object2024
Method for calibrating a measuring apparatus2023
Compensation optical system for an interferometric measuring system2021
Measuring device for interferometric determination of a shape of an optical surf2020
Measuring method and measuring arrangement for an imaging optical system2019
Probing element and coordinate measuring machine for measuring at least one meas2019
Test device and method for testing a mirror2019
Method for aligning a mirror of a microlithographic projection exposure apparatu2019