Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measuring device for interferometric determination of a shape of an optical surface

Measuring device for interferometric determination of a shape of an optical surface

US Patent 10527403 · Granted Jan 7, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measurement method for interferometrically determining a surface shape2025
Diffractive optical element for a test interferometer2025
Method and device for correcting a telecentricity error of an imaging device2024
Device and method for characterizing the surface shape of a test object2024
Method for calibrating a measuring apparatus2023
Compensation optical system for an interferometric measuring system2021
Measuring method and measuring arrangement for an imaging optical system2019
Test device and method for testing a mirror2019
Method for aligning a mirror of a microlithographic projection exposure apparatu2019
Interferometric measuring arrangement2019
Projection exposure tool for microlithography and method for microlithographic i2019
Method for aligning a mirror of a microlithographic projection exposure apparatu2018