Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Test device and method for testing a mirror

Test device and method for testing a mirror

US Patent 10422718 · Granted Sep 24, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Projection objective including an optical device2025
Production method and measurement method2025
Measurement method for interferometrically determining a surface shape2025
Measurement method for interferometrically determining a surface shape2025
Measurement method for interferometrically determining a surface shape2025
Parameterizing x-ray scattering measurement using slice-and-image tomographic im2025
Diffractive optical element for a test interferometer2025
Diffractive optical element for a test interferometer2025
Mirror, in particular for a microlithographic projection exposure apparatus2025
Method and device for correcting a telecentricity error of an imaging device2024
Optical system, heating arrangement, and method for heating an optical element i2024
Device and method for characterizing the surface shape of a test object2024