Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators

Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators

US Patent 10283330 · Granted May 7, 2019

Estimated economic value: $75,022,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tunability of edge plasma density for tilt control2025
Fan-out package structure and fabrication method therefor2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Low frequency RF generator and associated electrostatic chuck2025
Low frequency RF generator and associated electrostatic chuck2025
Low frequency RF generator and associated electrostatic chuck2025
Systems and methods for controlling a plasma sheath characteristic2025
Systems and methods for controlling a plasma sheath characteristic2025