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Home › Middle-of-line (MOL) metal resistor temperature sensors for localized temperature sensing of active semiconductor areas in integrated circuits (ICs)

Middle-of-line (MOL) metal resistor temperature sensors for localized temperature sensing of active semiconductor areas in integrated circuits (ICs)

US Patent 10247617 · Granted Apr 2, 2019

Estimated economic value: $8,975,000 ⓘ

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