3D microscope and methods of measuring patterned substrates

Assignee

• Kla-Tencor

Inventors

• Zhen Hou (21 patents)
• James Jianguo Xu (25 patents)
• Ken Kinsun Lee (46 patents)
• James Nelson Stainton (2 patents)
• Hung Phi Nguyen (48 patents)
• Rusmin Kudinar (39 patents)
• Ronny Soetarman (29 patents)

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