Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › EUV mirror and optical system comprising EUV mirror

EUV mirror and optical system comprising EUV mirror

US Patent 10203435 · Granted Feb 12, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical element for a EUV projection exposure system2025
Method and device for characterizing the surface shape of an optical element2024
Method and device for characterizing the surface shape of an optical element2022
Method for treating a reflective optical element for the EUV wavelength range, m2022
Method for treating a reflective optical element for the EUV wavelength range, m2022
Method for treating a reflective optical element for the EUV wavelength range, m2022
Optical assembly having a thermally conductive component2021
Method for repairing reflective optical elements for EUV lithography2021
Reflective optical element for EUV lithography2020
Projection optical unit for EUV projection lithography2020
Optical system, in particular for a microlithographic projection exposure appara2019
Optical system, in particular for a microlithographic projection exposure appara2019