Methods and apparatuses for cleaning electroplating substrate holders

Assignee

• Novellus Systems

Inventors

• Santosh Kumar (6 patents)
• Bryan L. Buckalew (75 patents)
• Steven T. Mayer (201 patents)
• Thomas A. Ponnuswamy (42 patents)
• Chad Michael Hosack (8 patents)
• Robert Rash (49 patents)
• Lee Peng Chua (26 patents)
• David W. Porter (61 patents)

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