Issued Patents All Time
Showing 76–85 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5424905 | Plasma generating method and apparatus | Noboru Nomura, Kenji Harafuji, Masafumi Kubota, Mitsuhiro Ohkuni, Ichiro Nakayama | 1995-06-13 |
| 5404079 | Plasma generating apparatus | Mitsuhiro Ohkuni, Masafumi Kubota, Noboru Nomura, Ichiro Nakayama | 1995-04-04 |
| 5345145 | Method and apparatus for generating highly dense uniform plasma in a high frequency electric field | Kenji Harafuji, Mitsuhiro Ohkuni, Masafumi Kubota, Noboru Nomura | 1994-09-06 |
| 5332880 | Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field | Masafumi Kubota, Kenji Harafuji, Mitsuhiro Ohkuni, Noboru Nomura, Ichiro Nakayama | 1994-07-26 |
| 5330606 | Plasma source for etching | Masafumi Kubota, Noboru Nomura | 1994-07-19 |
| 5318668 | Dry etching method | Shinichi Imai, Tadashi Kimura, Yoshimasa Inamoto | 1994-06-07 |
| 5296095 | Method of dry etching | Yutaka Nabeshima | 1994-03-22 |
| 5259922 | Drying etching method | Atsuhiro Yamano, Masafumi Kubota, Kenji Harafuji, Noboru Nomura | 1993-11-09 |
| 5254213 | Method of forming contact windows | — | 1993-10-19 |
| 4845048 | Method of fabricating semiconductor device | Masafumi Kubota | 1989-07-04 |