Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9224581 | Parallel plate reactor for uniform thin film deposition with reduced tool foot-print | Joachim Mai, Benjamin Strahm, Guillaume Wahli, Thomas Schulze | 2015-12-29 |
| 8205572 | Vacuum treatment installation for the production of a disk-shaped workpiece based on a dielectric substrate | Werner Wieland, Christoph Ellert | 2012-06-26 |
| 7868246 | Solar cell module and method of encapsulating same | — | 2011-01-11 |
| 7449220 | Method for manufacturing a plate-shaped workpiece | Werner Wieland, Christoph Ellert, Laurent Sansonnens | 2008-11-11 |
| 7244086 | Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates | Rainer Ostermann, Mustapha Elyaakoubi | 2007-07-17 |