Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056504 | Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates | Jacques Schmitt, Laurent Sansonnens, Michael Irzyk | 2011-11-15 |
| 7687117 | Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates | Jacques Schmitt, Laurent Sansonnens, Michael Irzyk | 2010-03-30 |
| 7662302 | Lifting and supporting device | Jacques Schmitt | 2010-02-16 |
| 7595096 | Method of manufacturing vacuum plasma treated workpieces | Phannara Aing, Rainer Ostermann, Klaus Neubeck, Benoit Riou | 2009-09-29 |
| 7487740 | Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates | Jacques Schmitt, Laurent Sanonnens, Michael Irzyk | 2009-02-10 |
| 7244086 | Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates | Rainer Ostermann, Arthur Buechel | 2007-07-17 |
| 6281469 | Capacitively coupled RF-plasma reactor | Jerome Perrin, Jacques Schmitt | 2001-08-28 |
| 5981899 | Capacitively coupled RF-plasma reactor | Jerome Perrin, Jacques Schmitt | 1999-11-09 |