Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8056504 | Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates | Jacques Schmitt, Mustapha Elyaakoubi, Michael Irzyk | 2011-11-15 |
| 7687117 | Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates | Jacques Schmitt, Mustapha Elyaakoubi, Michael Irzyk | 2010-03-30 |
| 7449220 | Method for manufacturing a plate-shaped workpiece | Arthur Buechel, Werner Wieland, Christoph Ellert | 2008-11-11 |