Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685813 | Plasma treatment device with two microwave plasma sources coupled to one another, and method for operating a plasma treatment device of this kind | — | 2020-06-16 |
| 10199250 | Substrate processing device | Mirko Kehr | 2019-02-05 |
| 9984857 | Plasma generation device | — | 2018-05-29 |
| 9556517 | Gas separation | Daniel Decker, Stefan Helbig, Oliver Loewel | 2017-01-31 |
| 9431217 | Microwave plasma generating device and method for operating same | Hermann Schlemm | 2016-08-30 |
| 9224581 | Parallel plate reactor for uniform thin film deposition with reduced tool foot-print | Benjamin Strahm, Guillaume Wahli, Arthur Buechel, Thomas Schulze | 2015-12-29 |
| 8790498 | Method and device for ion beam processing of surfaces | Dietmar Roth, Bernd Rau, Karl-Heinz Dittrich | 2014-07-29 |