Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009186 | Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility | Mirko Kehr, Erik ANSORGE, Sebastian Raschke | 2024-06-11 |
| 9431217 | Microwave plasma generating device and method for operating same | Joachim Mai | 2016-08-30 |