Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198907 | System for electrically decoupled, homogeneous temperature control of an electrode by means of heat conduction tubes, and processing facility comprising such a system | Christian Böhm | 2025-01-14 |
| 12009186 | Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility | Hermann Schlemm, Mirko Kehr, Erik ANSORGE | 2024-06-11 |
| 10964568 | Substrate carrier | Erik ANSORGE, Mirko Kehr, Christian Boehm | 2021-03-30 |