Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9224581 | Parallel plate reactor for uniform thin film deposition with reduced tool foot-print | Joachim Mai, Benjamin Strahm, Arthur Buechel, Thomas Schulze | 2015-12-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9224581 | Parallel plate reactor for uniform thin film deposition with reduced tool foot-print | Joachim Mai, Benjamin Strahm, Arthur Buechel, Thomas Schulze | 2015-12-29 |