Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6084763 | Method of holding wafer, method of removing wafer and electrostatic chucking device | Tomohide Jozaki | 2000-07-04 |
| 6063710 | Method and apparatus for dry etching with temperature control | Shingo Kadomura, Tomohide Jozaki | 2000-05-16 |
| 5981913 | Static electricity chuck and wafer stage | Shingo Kadomura, Tomohide Jozaki, Kinya Miyashita, Seiichirou Miyata, Yoshiaki Tatsumi | 1999-11-09 |
| 5968273 | Wafer stage for manufacturing a semiconductor device | Shingo Kadomura, Tomohide Jozaki, Kinya Miyashita, Yoshiaki Tatsumi, Seiichirou Miyata | 1999-10-19 |