Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8101521 | Methods for improving uniformity and resistivity of thin tungsten films | Lana Hiului Chan, Panya Wongsenakhum | 2012-01-24 |
| 7754604 | Reducing silicon attack and improving resistivity of tungsten nitride film | Panya Wongsenakhum, Joshua Collins | 2010-07-13 |
| 7691749 | Deposition of tungsten nitride | Karl B. Levy, Junghwan Sung, Kaihan Ashtiani, James A. Fair, Joshua Collins | 2010-04-06 |
| 7655567 | Methods for improving uniformity and resistivity of thin tungsten films | Lana Hiului Chan, Panya Wongsenakhum | 2010-02-02 |
| 7262125 | Method of forming low-resistivity tungsten interconnects | Panya Wongsenakhum, Aaron R. Fellis, Kaihan Ashtiani, Karl B. Levy, Joshua Collins +2 more | 2007-08-28 |
| 7141494 | Method for reducing tungsten film roughness and improving step coverage | Sang-Hyeob Lee, Karl B. Levy, Aaron R. Fellis, Panya Wongsenakhum, Joshua Collins +3 more | 2006-11-28 |
| 7005372 | Deposition of tungsten nitride | Karl B. Levy, Junghwan Sung, Kaihan Ashtiani, James A. Fair, Joshua Collins | 2006-02-28 |