Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5132544 | System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning | — | 1992-07-21 |
| 4985634 | Ion beam lithography | Gerhard Stengl | 1991-01-15 |
| 4967088 | Method and apparatus for image alignment in ion lithography | Gerhard Stengl, Hans Loschner, Ernst Hammell | 1990-10-30 |
| 4916322 | Arrangement for stabilizing an irradiated mask | Hans Loschner, Gerhard Stengel, Alfred Chalupka | 1990-04-10 |