EH

Ernst Hammell

IM Ims Ionen Mikrofabrikations Systeme Gellschaft M.B.H.: 1 patents #6 of 13Top 50%
📍 Wien, AT: #1,767 of 3,624 inventorsTop 50%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
4967088 Method and apparatus for image alignment in ion lithography Gerhard Stengl, Hans Loschner, Hilton F. Glavish 1990-10-30