Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8603731 | Resist underlayer film forming composition for electron beam lithography | Takahiro Sakaguchi, Rikimaru Sakamoto, Masaki Nagai | 2013-12-10 |
| 8501393 | Anti-reflective coating forming composition containing vinyl ether compound | Tadashi Hatanaka, Shigeo Kimura | 2013-08-06 |
| 8257908 | Coating-type underlayer coating forming composition for lithography containing vinylnaphthalene resin derivative | Takahiro Sakaguchi | 2012-09-04 |
| 8088546 | Underlayer coating forming composition for lithography containing naphthalene ring having halogen atom | Satoshi Takei, Takahiro Sakaguchi | 2012-01-03 |
| 7846638 | Composition for forming anti-reflective coating for use in lithography | Takahiro Kishioka, Ken-ichi Mizusawa, Rikimaru Sakamoto, Keisuke Nakayama, Yasuo Kawamura | 2010-12-07 |
| 7833681 | Mask blank and mask | Masahiro Hashimoto, Takahiro Sakaguchi, Rikimaru Sakamoto, Masaki Nagai | 2010-11-16 |
| 7816067 | Coating-type underlayer coating forming composition for lithography containing naphthalene resin derivative | Takahiro Kishioka, Takahiro Sakaguchi | 2010-10-19 |
| 7795369 | Sulfur atom-containing anti-reflective coating forming composition for lithography | Yoshiomi Hiroi, Keisuke Nakayama | 2010-09-14 |
| 7736822 | Resist underlayer coating forming composition for mask blank, mask blank and mask | Masahiro Hashimoto, Takahiro Sakaguchi, Rikimaru Sakamoto, Masaki Nagai | 2010-06-15 |
| 7598182 | Anti-reflective coating forming composition containing polyamic acid | Tadashi Hatanaka, Shigeo Kimura | 2009-10-06 |
| 7425399 | Composition for forming anti-reflective coating for use in lithography | Takahiro Kishioka, Ken-ichi Mizusawa, Rikimaru Sakamoto, Keisuke Nakayama, Yasuo Kawamura | 2008-09-16 |
| 7038328 | Anti-reflective compositions comprising triazine compounds | Keisuke Nakayama, Rama Puligadda | 2006-05-02 |
| 6680160 | Halogenated anti-reflective coatings | Ken-ichi Mizusawa, Shin-Ya Arase, Rama Puligadda | 2004-01-20 |
| 6632544 | Aromatic amine derivative, soluble conductive compound, and electroluminscent element | Junji Kido, Hiroyoshi Fukuro, Hitoshi Furusho | 2003-10-14 |
| 6632545 | Electroluminescent element | Junji Kido, Hiroyoshi Fukuro, Hitoshi Furusho | 2003-10-14 |
| 6495305 | Halogenated anti-reflective coatings | Ken-ichi Mizusawa, Shin-Ya Arase, Rama Puligadda | 2002-12-17 |