Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2015-04-28 |
| 8797506 | Exposure apparatus, exposure method, and device fabrication method | Susumu Makinouchi | 2014-08-05 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8272544 | Exposure apparatus, exposure method, and device fabrication method | Susumu Makinouchi | 2012-09-25 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 7932996 | Exposure apparatus, exposure method, and device fabrication method | Susumu Makinouchi | 2011-04-26 |
| 6107621 | Modular encoder and method of manufacturing the same | Kou Ohno, Yasuhiko Hashimoto, Shigeki Yamauchi | 2000-08-22 |
| 5663557 | Multiple rotating absolute encoder capable of accurately latching absolute address data with data on number of rotations | Tohru Morita, Kou Ohno, Yuuji Yamazaki | 1997-09-02 |
| 5252825 | Absolute encoder using interpolation to obtain high resolution | Koh OHNO, Tsuyoshi Matsumoto | 1993-10-12 |