Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6139983 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Tsuneaki Ohashi, Kiyoshi Araki, Sadanori Shimura | 2000-10-31 |
| 6051303 | Semiconductor supporting device | Kiyoshi Araki, Tsuneaki Ohashi | 2000-04-18 |
| 6001760 | Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck | Yukimasa Mori, Michio Takahashi, Yuki Bessho | 1999-12-14 |
| 5998321 | Aluminum nitride sintered body, electronic functional material, and electrostatic chuck | Kiyoshi Araki, Tsuneaki Ohashi | 1999-12-07 |
| 5993699 | Aluminum nitride based composite body electronic functional material, electrostatic chuck and method of producing aluminum nitride based composite body | Kiyoshi Araki, Tsuneaki Ohashi | 1999-11-30 |
| 5705129 | NOx sensor | Tomonori Takahashi, Naoyuki Ogawa, Toshihiro Yoshida | 1998-01-06 |
| 5602326 | Apparatus and method for measuring concentrations of gas components | Tomonori Takahashi, Toshihiro Yoshida, Takao Murase, Nobuhide Kato | 1997-02-11 |