Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632549 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Tsuneaki Ohashi, Kiyoshi Araki, Yuji Katsuda | 2003-10-14 |
| 6562183 | Anti-corrosive parts for etching apparatus | Hirotake Yamada, Tsuneaki Ohashi | 2003-05-13 |
| 6239402 | Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses | Kiyoshi Araki, Yuji Katsuda, Tsuneaki Ohashi | 2001-05-29 |
| 6139983 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Tsuneaki Ohashi, Kiyoshi Araki, Yuji Katsuda | 2000-10-31 |