Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8178455 | Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member | Naomi Teratani, Toru Hayase, Masahiro Kida | 2012-05-15 |
| 8097549 | Method for manufacturing cordierite ceramics | Atsushi Watanabe, Yohei Ono | 2012-01-17 |
| 8058198 | Cordierite ceramic and method of producing the same | Satoshi Yamazaki, Atsushi Watanabe, Yohei Ono, Takehiko Watanabe | 2011-11-15 |
| 8022001 | Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same | Naomi Teratani, Toru Hayase | 2011-09-20 |
| 7915189 | Yttrium oxide material, member for semiconductor-manufacturing apparatus, and method for producing yttrium oxide material | Yoshimasa Kobayashi | 2011-03-29 |
| 7842370 | Cordierite ceramic and method for manufacturing the same | Yohei Ono, Satoshi Yamazaki, Shuji Ueda | 2010-11-30 |
| 7833924 | Yttrium oxide-containing material, component of semiconductor manufacturing equipment, and method of producing yttrium oxide-containing material | Yoshimasa Kobayashi, Hiroaki Sakai, Koichi Niihara, Tadachika Nakayama | 2010-11-16 |
| 7803733 | Aluminum nitride sintered body and semiconductor manufacturing apparatus member | Naomi Teratani | 2010-09-28 |
| 7776774 | Composite material and method of producing the same | Yoshimasa Kobayashi | 2010-08-17 |
| 7744780 | Yttrium oxide material, member for use in semiconductor manufacturing apparatus, and method for producing yttrium oxide material | Yoshimasa Kobayashi | 2010-06-29 |
| 7148166 | Aluminum nitride ceramics and a member used for the production of semiconductors | Naomi Teratani | 2006-12-12 |
| 6919287 | Aluminum nitride materials and members used for the production of semiconductors | Naomi Teratani, Jun Yoshikawa | 2005-07-19 |
| 6919286 | Aluminum nitride ceramics, members for use in a system for producing semiconductors, and corrosion resistant members | Jun Yoshikawa | 2005-07-19 |
| 6884742 | Aluminum nitride ceramics, members for use in a system for producing semiconductors, corrosion resistant members and conductive members | Jun Yoshikawa | 2005-04-26 |
| 6800576 | Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses | Hideyoshi Tsuruta | 2004-10-05 |
| 6783875 | Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members | Hirotake Yamada, Tsuneaki Ohashi, Masaaki Masuda, Masashi Harada, Hiroyuki Iwasaki +1 more | 2004-08-31 |
| 6632549 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Tsuneaki Ohashi, Kiyoshi Araki, Sadanori Shimura | 2003-10-14 |
| 6607836 | Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors | Jun Yoshikawa, Masaaki Masuda, Chikashi Ihara | 2003-08-19 |
| 6486085 | Aluminum nitride sintered bodies and semiconductor-producing members including same | Masaaki Masuda | 2002-11-26 |
| 6468366 | Surface nitriding member | Taketoshi Tsutsumi, Masaaki Masuda | 2002-10-22 |
| 6364965 | Aluminum-containing member and a method for producing such an aluminum-containing member | Masaaki Masuda, Taketoshi Tsutsumi | 2002-04-02 |
| 6294771 | Electrically heated substrate with multiple ceramic parts each having different volume resitivities | Kiyoshi Araki, Tsuneaki Ohashi | 2001-09-25 |
| 6239402 | Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses | Kiyoshi Araki, Sadanori Shimura, Tsuneaki Ohashi | 2001-05-29 |
| 6204489 | Electrically heated substrate with multiple ceramic parts each having different volume restivities | Kiyoshi Araki, Tsuneaki Ohashi | 2001-03-20 |
| 6156686 | Porous composite ceramic sintered bodies and a production process thereof | Kiyoshi Araki, Tsuneaki Ohashi | 2000-12-05 |