Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9025133 | Laser interference lithography apparatus using fiber as spatial filter and beam expander | YI SUN, David Mikolas, Pao-Te Lin, En-Chiang Chang, Tze-Bin Huang | 2015-05-05 |
| 8659825 | Sample carrying apparatus capable of revolving sample | Hsiu-Ming Chang, Ann-Shyn Chiang | 2014-02-25 |
| 8400616 | Laser interference lithography apparatus capable of stitching small exposed areas into large exposed area | — | 2013-03-19 |
| 7947430 | Method of forming 3D micro structures with high aspect ratios | Heng-Chi Huang, Wen-Cheng Yang | 2011-05-24 |
| 7906273 | Method of manufacturing hollow micro-needle structures | — | 2011-03-15 |
| 7538025 | Dual damascene process flow for porous low-k materials | Chao-Cheng Chen, Chen-Nan Yeh | 2009-05-26 |
| 7436009 | Via structures and trench structures and dual damascene structures | Yi-Chen Huang, Ming-Hong Hsieh, Hui Ouyang, Yi-Nien Su, Hun-Jan Tao | 2008-10-14 |
| 7384729 | Method of manufacturing a LIGA mold by backside exposure | Heng-Chi Huang | 2008-06-10 |
| 7217663 | Via hole and trench structures and fabrication methods thereof and dual damascene structures and fabrication methods thereof | Yi-Chen Huang, Ming-Hong Hsieh, Hui Ouyang, Yi-Nien Su, Hun-Jan Tao | 2007-05-15 |
| 6809028 | Chemistry for liner removal in a dual damascene process | Chao-Cheng Chen | 2004-10-26 |
| 6505520 | Method for preparing a thermal pulsed micro flow senor | Cheng-Kuo Lee, Ching-Yi Wu | 2003-01-14 |
| 6289746 | Thermal pulsed micro flow sensor | Cheng-Kuo Lee, Ching-Yi Wu | 2001-09-18 |