Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9025133 | Laser interference lithography apparatus using fiber as spatial filter and beam expander | Chien-Chung Fu, YI SUN, Pao-Te Lin, En-Chiang Chang, Tze-Bin Huang | 2015-05-05 |
| 7196337 | Particle processing apparatus and methods | — | 2007-03-27 |
| 6884729 | Global planarization method | Jui-Kun Lee, Chris C. Yu | 2005-04-26 |