Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8091063 | Method and apparatus for characterizing an integrated circuit manufacturing process | Mark Laird, Yiping Szu | 2012-01-03 |
| 6287951 | Process for forming a combination hardmask and antireflective layer | Kevin Lucas, Christopher D. Pettinato, Stanley M. Filipiak, Yeong-Jyh T. Lii | 2001-09-11 |
| 5117273 | Contact for integrated circuits | David Matthew James Stark | 1992-05-26 |