Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6287951 | Process for forming a combination hardmask and antireflective layer | Kevin Lucas, Wayne Clark, Stanley M. Filipiak, Yeong-Jyh T. Lii | 2001-09-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6287951 | Process for forming a combination hardmask and antireflective layer | Kevin Lucas, Wayne Clark, Stanley M. Filipiak, Yeong-Jyh T. Lii | 2001-09-11 |