Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9099506 | Transfer chamber between workstations | — | 2015-08-04 |
| 8292563 | Nonproductive wafer buffer module for substrate processing apparatus | — | 2012-10-23 |
| 6732855 | Conveying element and conveyor means for conveying wafer receptacles, and method | Michael Lering, Volker Tegeder | 2004-05-11 |
| 6663340 | Wafer carrier transport system for tool bays | Jason Zeakes, Karl Mautz, William M. Hiatt | 2003-12-16 |
| 6468017 | Vehicle, system and method for loading and unloading | — | 2002-10-22 |
| 6426698 | Lot signalling device | Larry E. Frisa, Mark Hiatt | 2002-07-30 |
| 6389707 | Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method | Martin Peiter | 2002-05-21 |