Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7054714 | Installation for processing a semiconductor wafer and method for operating the installation | Christoph Hocke, Gregor Kübart | 2006-05-30 |
| 6881914 | Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs | Reiner Missale, Martin Peiter | 2005-04-19 |
| 6857841 | Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool | — | 2005-02-22 |
| 6791074 | Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool | Sven Hahn, Mathias Schulz | 2004-09-14 |
| 6732855 | Conveying element and conveyor means for conveying wafer receptacles, and method | Volker Tegeder, Clinton Haris | 2004-05-11 |
| 6389706 | Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method | Gregor Kuebart, Sven Hahn | 2002-05-21 |