Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875921 | Flexible purge management system | Martin Bachlechner | 2018-01-23 |
| 7035003 | Microscope arrangement for inspecting a substrate | Mandy Vogel | 2006-04-25 |
| 6914006 | Wafer scribing method and wafer scribing device | Eckhard Marx, Karl Mautz | 2005-07-05 |
| 6881914 | Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs | Michael Lering, Reiner Missale | 2005-04-19 |
| 6877944 | Configuration for transporting a semiconductor wafer carrier | — | 2005-04-12 |
| 6866200 | Semiconductor device identification apparatus | Eckhard Marx | 2005-03-15 |
| 6389707 | Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method | Clinton Haris | 2002-05-21 |