Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847396 | FOUP measurement chamber | Nadja Erler-Lohse, Cornelius Günther | 2020-11-24 |
| 9875921 | Flexible purge management system | Martin Peiter | 2018-01-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847396 | FOUP measurement chamber | Nadja Erler-Lohse, Cornelius Günther | 2020-11-24 |
| 9875921 | Flexible purge management system | Martin Peiter | 2018-01-23 |