Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462427 | Interface device for a purging unit for purging a wafer container | Bernhard Stein, Udo Scheller, Heinz-Martin Esser, Steffen Pollack | 2022-10-04 |
| 10847396 | FOUP measurement chamber | Martin Bachlechner, Nadja Erler-Lohse | 2020-11-24 |