Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12115654 | End effector for slab formed substrates | Siegfried Ickert | 2024-10-15 |
| 11462427 | Interface device for a purging unit for purging a wafer container | Bernhard Stein, Cornelius Günther, Udo Scheller, Heinz-Martin Esser | 2022-10-04 |
| 9796085 | Mobile device for manipulating objects | Stefan Richter, Carsten Grunert, Sven Schirmer, Siegfried Ickert, Wilfried Krause | 2017-10-24 |
| 8201814 | Wafer catching device | Jürgen Döpping, Matthias Reinecke, Holger Brosche, Hans-Joachim Gretzschel | 2012-06-19 |
| 8168036 | Apparatus and method for the removal of pellicles from masks | Lothar Andritzke, Holger Brosche, Steffen Krueger, Klaus-Peter Weiss, Hans-Joachim Gretzschel | 2012-05-01 |
| 8123866 | Wafer manufacturing method and device | Jürgen Döpping, Matthias Reinecke, Holger Brosche, Hans-Joachim Gretzschel | 2012-02-28 |