Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8201814 | Wafer catching device | Jürgen Döpping, Matthias Reinecke, Holger Brosche, Steffen Pollack | 2012-06-19 |
| 8168036 | Apparatus and method for the removal of pellicles from masks | Lothar Andritzke, Holger Brosche, Steffen Krueger, Steffen Pollack, Klaus-Peter Weiss | 2012-05-01 |
| 8123866 | Wafer manufacturing method and device | Jürgen Döpping, Matthias Reinecke, Holger Brosche, Steffen Pollack | 2012-02-28 |