Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8168036 | Apparatus and method for the removal of pellicles from masks | Holger Brosche, Steffen Krueger, Steffen Pollack, Klaus-Peter Weiss, Hans-Joachim Gretzschel | 2012-05-01 |